The overview below includes both dedicated phase mask services (such as phase mask cleaning and NFH services) as well as grating foundry services in general.
Phase mask cleaning services
Phase masks may become contaminated during use – an effective cleaning process is important in ensuring longest possible lifetime of the Phase mask. Ibsen offers Cleaning Service for your Phase masks, which includes an extensive evaluation of the Phase mask defect level before and after cleaning.
Grating foundry services
Ibsen offers grating foundry services for high quality grating exposure on your wafers. We can offer basic interferometric 2-beam exposure (the patterning technology behind our 0.01 nm period accuracy Phase masks), or for higher volumes holographic/lithographic stepper technology.